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http://elar.tsatu.edu.ua/handle/123456789/17672
Title: | Structural and optical properties of ZnO films obtained on mesoporous Si substrates by the method of HF magnetron sputtering |
Authors: | KIDALOV, VALERIY Кідалов, Валерій Віталійович DYADENCHUK, ALENA Дяденчук, Альона Федорівна BACHERIKOV, YURIY ZHUK, ANTON GORBANIUK, TETYANA ROGOZIN, Igor KIDALOV, Vitali |
Keywords: | ZnO film;porous Si;HF magnetron sputtering |
Issue Date: | 2020 |
Citation: | Structural and optical properties of ZnO films obtained on mesoporous Sisubstrates by the method of HF magnetron sputtering. V. Kidalov, A. Dyadenchuk, Y. Bacherikov et al.; Turkish Journal of Physics, 2020, 44: pp. 57 – 66. References 30 |
Abstract: | ENG : In the present work, ZnO films were obtained on mesoporous silicon substrates by the method of HF magnetron sputtering of a metallic zinc target in reaction oxygen and argon gas medium. The properties of the ZnO films obtained on mesoporous substrates were studied depending on the ratio of the partial pressures of the working gases (argon/oxygen). X-ray analysis showed that in the process of deposition, the ZnO films of a hexagonal structure were formed. The effect of the porous layer on the structural and luminescent properties of the thin ZnO films was studied. The results showed that the porous silicon substrate reduces residual stresses and can be used for obtaining high-quality ZnO films |
URI: | http://elar.tsatu.edu.ua/handle/123456789/17672 |
DOI: | doi:10.3906/fiz-1909-10 |
Appears in Collections: | Кафедра Вища математика та фізика |
Files in This Item:
File | Description | Size | Format | |
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KIDALOV, V; DYADENCHUK Structural _.pdf | 1.93 MB | Adobe PDF | View/Open |
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