ТАВРІЙСЬКИЙ ДЕРЖАВНИЙ
АГРОТЕХНОЛОГІЧНИЙ УНІВЕРСИТЕТ
ІМЕНІ ДМИТРА МОТОРНОГО
Tsatu logo DMYTRO MOTORNYI
TAVRIA STATE
AGROTECHNOLOGICAL UNIVERSITY
ISSN: 2524-0714

Please use this identifier to cite or link to this item: http://elar.tsatu.edu.ua/handle/123456789/10735
Title: Structural and optical properties of ZnO films obtained on mesoporous Si substrates by the method of HF magnetron sputtering
Authors: Kidalov, Valeriy
Diadenchuk, Alona
Дяденчук, Альона Федорівна
Дяденчук, Алена Федоровна
Bacherikov, Yu.
Zhuk, A.
Gorbaniuk, T.
Rogozin, I.
Kidalov, Vitali
Keywords: ZnO film;porous Si;HF magnetron sputtering
Issue Date: 2020
Series/Report no.: Turkish Journal of Physics;V. 44 (Pp. 57-66)
Abstract: In the present work, ZnO films were obtained on mesoporous silicon substrates by the method of HF magnetron sputtering of a metallic zinc target in reaction oxygen and argon gas medium. The properties of the ZnO films obtained on mesoporous substrates were studied depending on the ratio of the partial pressures of the working gases (argon/oxygen). X-ray analysis showed that in the process of deposition, the ZnO films of a hexagonal structure were formed. The effect of the porous layer on the structural and luminescent properties of the thin ZnO films was studied. The results showed that the porous silicon substrate reduces residual stresses and can be used for obtaining high-quality ZnO films.
URI: http://elar.tsatu.edu.ua/handle/123456789/10735
Appears in Collections:Кафедра Вища математика та фізика

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