Browsing by Subject HF magnetron sputtering
Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
2020 | Structural and optical properties of ZnO films obtained on mesoporous Si substrates by the method of HF magnetron sputtering | Kidalov, Valeriy; Diadenchuk, Alona; Дяденчук, Альона Федорівна; Дяденчук, Алена Федоровна; Bacherikov, Yu.; Zhuk, A.; Gorbaniuk, T.; Rogozin, I.; Kidalov, Vitali |
2020 | Structural and optical properties of ZnO films obtained on mesoporous Si substrates by the method of HF magnetron sputtering | KIDALOV, VALERIY; Кідалов, Валерій Віталійович; DYADENCHUK, ALENA; Дяденчук, Альона Федорівна; BACHERIKOV, YURIY; ZHUK, ANTON; GORBANIUK, TETYANA; ROGOZIN, Igor; KIDALOV, Vitali |